Conferences

International Conferences

16. Jaejun Lee and Woongkyu Lee "Enhancing Resistive Switching Properties of TiO2 Thin Films Grown by Atomic Layer Deposition through Pyramid-Structured PDMS Substrate.", AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) - poster

15. Hyeongjun Kim and Woongkyu Lee, "Improvement of Interfacial Properties of ZrO2/Al2O3/TiN Capacitors Grown by Atomic Layer Deposition through Ar Plasma Treatment", AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) - poster

14.  Daeun Lim, Eun A Kim, Seong-Yong Cho, and Woongkyu Lee, “Atomic Layer Deposition of Titanium Oxide Films with Acetone for Capacitors”, IEEE EDTM 2023, Seoul, Korea, March 7-March 10 (2023)  - poster

13.   Woongkyu Lee, “Atomic Layer Deposition of SrO for High-k Dielectric Thin Films”, KISM 2022, Busan, Korea, November 13-November 16 (2022)  - oral

12.    (Invited) Woongkyu Lee, “Atomic layer deposition of SrTiO3 thin films and their applications to DRAM capacitors”, IUMRS-ICA 2021, Jeju-do, Korea, October 3-October 8 (2021)  - oral

11.   Daeun Lim, Yeji Lee, Jonghyun Kim, Jina Kim, Jeong Hwan Han, and Woongkyu Lee, "Growth of Rutile-TiO2 Thin Films on SnO2 layers as Gate Oxide in MOS Capacitors", IUMRS-ICA 2021, Jeju-do, Korea,  October 3-October 8 (2021) - poster

10.   Jonghyun Kim, Daeun Lim, Yeji Lee, and Woongkyu Lee, "The Effect of Growth Temperature on Atomic Layer Deposition of Ti-doped ZnO Thin Films", IUMRS-ICA 2021, Jeju-do, Korea, October 3-October 8 (2021) - poster

9.   Yeji Lee, Daeun Lim, Yujin Kim, Jonghyun Kim, Sungkyu Kim, and Woongkyu Lee, "Atomic Layer Deposition of Al2O3 Thin Films with Trimethylaluminum and Acetone", IUMRS-ICA 2021, Jeju-do, Korea, October 3-October 8 (2021) - oral

8.    Woongkyu Lee, Sang Hyeon Kim, Cheol Hyun An, Yumin Kim, Dae Seon Kwon, Dong-Gun Kim, Soon Hyung Cha, Seong Tak Cho, Junil Lim, and Cheol Seong Hwang, “Electrical Properties of Al-doped SrTiO3 Thin Films Grown by Atomic Layer Deposition”, TACT 2019, Taipei, Taiwan, November 17-20 (2019) - poster

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7.     Woongkyu Lee, Woojin Jeon, Cheol Hyun An. Min Jung Chung, and Cheol Seong Hwang, “Atomic Layer Deposition of SrTiO3 Films with {Sr(demamp)(tmhd)}2 for DRAM Capacitor Application”, ALD 2015, Portland, United States, June 28-July 1 (2015) - oral

6.     Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An, Min Jung Chung, Taek-Mo Chung, Bo Keun Park, Sheby M. George, Chang Gyoun Kim, and Cheol Seong Hwang, "Improved Initial Growth Behavior of Atomic Layer Deposited SrTiO3 Films with [Sr(demamp)(tmhd)]2 as Sr-precursor", PacSurf 2014, Hapuna Beach Prince Hotel, Kohala Coast, Hawaii, US, December 7-11 (2014) - poster

5.     Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An, Min Jung Chung, Taek-Mo Chung, Chang Gyoun Kim, Bo Keun Park, Sheby M. George, and Cheol Seong Hwang, "Atomic Layer Deposition of SrTiO3 Films with Sr(demamp)(tmhd) as Sr-precursor", ALD 2014, Granvia Hotel, Kyoto, Japan, June 15-18 (2014) - oral

4.     Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An, Cheol Seong Hwang, "Formation of micro-defects in atomic layer deposited SrTiO3 films by rapid thermal annealing", CECAM-Workshop Functional oxides for emerging technologies, Bremen University, Bremen, Germany, Oct 14-18 (2013) – poster

3.     Woongkyu Lee, Woojin Jeon, Yeon Woo Yoo, Cheol Hyun An and Cheol Seong Hwang, "Reducing Micro-defect Formation in Atomic Layer Deposited SrTiO3 Films during Crystallization Annealing", ALD 2013, San Diego Marriott Marquis & Marina, San Diego, United States, July 28-31 (2013) – poster

2.     Woongkyu Lee, Jeong Hwan Han, Woojin Jeon, Yeon Woo Yoo, Changhee Ko, Julien Gatineau and Cheol Seong Hwang, "Atomic Layer Deposition of SrTiO3 Films with Cp-Based Precursors from DRAM Capacitors", Nature Conference 2012, Aachen, Germany, June(17-20),June 18th (2012) - contribution talk (oral and poster)

1.     Woongkyu Lee, Sang Woon Lee, Jeong Hwan Han, Sora Han, Julien Gatineau and Cheol Seong Hwang, "Controlling initial growth behavior of ALD-SrTiO3 films Using the interposed ALD-Al2O3 layers", ALD 2011, Cambridge, June 26~29 (2011) – poster 


Domestic Conferences

42. Taehyun Kim, Seokho Cho, Jiyoung Park, and Woongkyu Lee, "Initial Growth Behavior and Perovskite Crystal Structure of SrRuO3 Thin Films Using Atomic Layer Deposition", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- poster

41. Seung min Jo, Haram Yang, and Woongkyu Lee, "Annealing of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- poster

40. Seokho Cho, Kyunghun Lyu, and Woongkyu Lee, "Optimization of Sputtering Process of TiN Thin Films for Use as a Capacitor Electrode", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- poster

39. Juan Hong, Hyeongjun Kim, and Woongkyu Lee, "Enhancement of Dielectric Constant through Highly Stoichiometric TiO2 Thin Films Using Ozone Post-treatment", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- poster

38. Sangyeon Jeong, Jaejun Lee, Soonbin Kwon and Woongkyu Lee, "Synthesis of SrTiO3 Thin Films Using Atomic Layer Deposition with Sr(dmts)(hfac)2/Water and (CpMe5)Ti(OMe)3/Ozone on TiN Substrates", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- poster

37. Kyunghun Lyu, Seokho Cho, and Woongkyu Lee, "Mobility Improvement of Amorphous Insulator and Crystalline Semiconductor Nanolaminate Structure Grown by Atomic Layer Deposition", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- poster

36. Haram Yang, Hyeongjun Kim, and Woongkyu Lee, "Development of Atomic Layer Etching of ZrO2 Thin Films Using NF3 Plasma and TiCl4", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- oral

35. Jaejun Lee, Sangyeon Jeong, and Woongkyu Lee, "Synthesis of Perovskite SrTiO3 Thin Films by Atomic Layer Deposition of SrF2 and TiO2", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- oral 

34. Hyeongjun Kim and Woongkyu Lee, "Influence of Zr-Precursor Ligands on the Growth and Capacitor Properties of ZrO2 Thin Films Grown by ALD", KCS 2025, Gangwon-do, Korea, February 12 - February 14 (2025)- oral 

33.  Taehyun Kim, Seokho Cho and Woongkyu Lee, "Perovskite SrRuO3 Electrodes Grown by Atomic Layer Deposition.", Fall Meeting of Korean Ceramic Society, October 17 - October 18 (2024) - oral

32.  (우수 포스터상) Haram Yang, Hyeongjun Kim and Woongkyu Lee, "Characterization of ZrO2 Thin Films after Atomic Layer Etching Process Using NF3 Plasma and TiCl4", Fall Meeting of Korean Ceramic Society, October 17 - October 18 (2024) - poster

31.  Taehyun Kim,  Juan Hong and Woongkyu Lee, "Atomic Layer Deposited RuO2 Electrode Flim with Wide ALD Window", KIEEME Annual Summer Conference 2024, Busan, Korea,  June 24 -June 26 (2024) - poster

30.  Jaejun Lee , Sangyeon Jeong and Woongkyu Lee, "Analysis of SrTiO3 Thin Films Grown by Atomic Layer Deposition Using Sr(dmts)(hfac)2, (CpMe5)Ti(Ome)3, and O3",  KIEEME Annual Summer Conference 2024, Busan, Korea,  June 24 -June 26 (2024) - poster

29. (최우수상) Haram Yang , Hyeongjun Kim and Woongkyu Lee, "Atomic Layer Etching of ZrO2 Thin Films with NF3 plasma and TiCl4 for DRAM Capacitors", KIEEME Annual Summer Conference 2024, Busan, Korea,  June 24 -June 26 (2024) - poster

28. (최우수상) Hyeongjun Kim , Haram Yang and Woongkyu Lee, "Evaluation of Growth Behavior and Electrical Properties of Novel-Zr Precursor", KIEEME Annual Summer Conference 2024, Busan, Korea,  June 24 -June 26 (2024) - poster

27.  Juan Hong , Taehyun Kim and Woongkyu Lee, "Atomic Layer Deposition of TiO2 Thin Films with a Novel-Ti Precursor for DRAM Capacitors", KIEEME Annual Summer Conference 2024, Busan, Korea,  June 24 -June 26 (2024) - poster

26. (최우수상)  Kyunghun Lyu , Jaejun Lee and Woongkyu Lee, "n-Type Heteromorphic Superlattice Oxide Semiconductor Using Atomic Layer Deposition",  KIEEME Annual Summer Conference 2024, Busan, Korea,  June 24 -June 26 (2024) - poster

25.  Sangyeon Jeong, Jaejun Lee and Woongkyu Lee, "Atomic Layer Deposition of SrO and SrTiO3 Thin Films With Sr(dmts)(hfac)2 and Water", KIEEME Annual Summer Conference 2024, Busan, Korea,  June 24 -June 26 (2024) - poster

24. (현장우수포스터상) Taehyun Kim, Daeun Lim, Juan Hong and Woongkyu Lee, "Effects on Electrical Properties of TiO2-Based Capacitors by Improving Bulk and Interface Properties ", KCS 2024, Gyeongju, Korea, January 24 - January 26 (2024) - poster 

23. Jaejun Lee , Kyunghun Lyu and Woongkyu Lee, "Enhancement of Resistance Switching Behavior of Au/TiO2/Au Memristors on PDMS Substrate with Pyramid Structure", KCS 2024, Gyeongju, Korea, January 24 - January 26 (2024) - poster 

22. Haram Yang , Hyeongjun Kim and Woongkyu Lee, "Growth Characteristics and Film Properties of Molybdenum Oxide Thin  Films by Atomic Layer Deposition with Different Oxygen Sources", KCS 2024, Gyeongju, Korea, January 24 - January 26 (2024) - poster  

21. Hyeongjun Kim , Haram Yang and Woongkyu Lee, "Improvement of Electrical Properties of ZrO2/Al2O3 Capacitors via Interfacial Defect Control Using Ar Plasma Treatment", KCS 2024, Gyeongju, Korea, January 24 - January 26 (2024) - oral  

20. Juan Hong , Taehyun Kim and Woongkyu Lee, "Atomic Layer Deposition of Titanium Dioxides Thin Films Using New-Ti Precursor on Different Substrates", KCS 2024, Gyeongju, Korea, January 24 - January 26 (2024) - poster  

19. Kyunghun Lyu , Jaejun Lee and Woongkyu Lee, "Atomic Layer Deposition of In2O3with Different Temperatures for n-Type Oxide Semiconductors", KCS 2024, Gyeongju, Korea, January 24 - January 26 (2024) - poster

18. Hyeongjun Kim and Woongkyu Lee, "Improvement of Electrical Properties of ZrO2 - based Capacitors via Plasma Treatment", KVS 2023, Jeju-do, Korea,  August 20 -August 23 (2023) - poster

17. (invited) Woongkyu Lee, "Atomic Layer Deposition of SrO, SrTiO3, and Al-doped SrTiO3 Thin Films", KCS 2023, Gangwon-do, Korea,  February 13 - February 14 (2023) - oral

16. Daeun Lim, Yeji Lee, Jonghyun Kim, Jina Kim, Jeong Hwan Han, Eun A Kim, Seong-Yong Cho, and Woongkyu Lee, "Growth of High-k Rutile TiO2 Thin Films on SnO2 Layers Using Atomic Layer Deposition for DRAM Capapcitors", KCS 2023, Gangwon-do, Korea,  February 13 - February 14 (2023) - oral

15. Yeji Lee, Jonghyun Kim, Daeun Lim, Woo Suk Kim, Chanwoo Park, Bo Keun Park, Taek-Mo Chung, Eun A Kim, Seong-Yong Cho, and Woongkyu Lee, "Effects of Al Doping on Films Properties of SrTiO3 Dielectrics Grown by Atomic Layer Deposition for DRAM Capacitor", KCS 2023, Gangwon-do, Korea,  February 13 - February 14 (2023) - poster

14. Jonghyun Kim, Daeun Lim, Yeji Lee, Hyeong Jun Kim, Yumi Wang, Hongseok Jang, Suhyoung Yun, Eun A Kim, Seong-Yong Cho, and Woongkyu Lee, "The Growth Behaviors and Electrical Properties of TiO2 Thin Films Using Discrete Feeding Method Atomic Layer Deposition", KCS 2023, Gangwon-do, Korea,  February 13 - February 14 (2023) - poster

13. (invited) Woongkyu Lee, "Atomic Layer Deposition of High-k Oxide Thin Films", KFS 2022 Fall Conference, Busan, Korea, October 27-October 28 (2022) - oral

12. Daeun Lim, Yeji Lee, Jonghyun Kim, and Woongkyu Lee, "Atomic Layer Deposition of TiO2 Thin Films with Titanium Isopropoxide and Acetone on Si", KIEEME Annual Summer Conference 2022,  Gangwon-do, Korea, June 22-June 24 (2022) - poster

11. (최우수상) Yeji Lee, Daeun Lim, Jonghyun Kim, Chanwoo Park, Bo Keun Park, Taek-Mo Chung, and Woongkyu Lee, "Atomic Layer Deposition of SrO Thin Films with {Sr(ddmap)(tmhd)}2  and O3 on Si substrate", KIEEME Annual Summer Conference 2022,  Gangwon-do, Korea, June 22-June 24 (2022) - poster

10. Jonghyun Kim, Daeun Lim, Yeji Lee, Yumi Wang, Hongseok Jang, Suhyong Yun,, and Woongkyu Lee, "Atomic Layer Deposition of TiO2 Films with a new Cp-based Ti-precursor, CpTi(OiBu)­3, for DRAM Capacitors", KIEEME Annual Summer Conference 2022,  Gangwon-do, Korea, June 22-June 24 (2022) - poster

9.  Jaemin Gil, Ju Sung Kim, and Woongkyu Lee, "Suppression of the Floating Body Effect of the Double-Gate Transistor with the Buried Oxide Engineering Method",  KCS 2022, Gangwon-do, Korea,  January 24-January 26 (2022) - poster

8.  Daeun Lim, Yeji Lee, Jonghyun Kim, Jina Kim, Jeong Hwan Han, and Woongkyu Lee, "Growth of in-situ Crystallized Rutile-TiO2 Thin Films on SnO2 layers", KCS 2022, Gangwon-do, Korea,  January 24-January 26 (2022) - poster

7.   Jonghyun Kim, Daeun Lim, Yeji Lee, Yumi Wang, Hongseok Jang, Suhyong Yun, and Woongkyu Lee, "Atomic Layer Deposition of TiO2 Thin Films Using a Novel Ti-precursor, CpTi(Oi Bu)3, for DRAM Capacitors on Various Substrates", KCS 2022, Gangwon-do, Korea,  January 24-January 26 (2022) - oral

6.   (현장우수포스터상) Yeji Lee, Daeun Lim, Jonghyun Kim, Seungjo Yea, Chanwoo Park, Bo Keun Park, Taek-Mo Chung, and Woongkyu Lee, "Atomic Layer Deposition of SrO Thin Film with a Novel Sr Precursor and O3 on Si substrate", KCS 2022, Gangwon-do, Korea,  January 24-January 26 (2022) - poster

5. (invited) Woongkyu Lee, Atomic Layer Deposition for DRAM Capacitor Dielectrics", 2021 Fall conference of KSDT, Yongin Cultural Art Center, November 18 (2021) - oral

4.   Daeun Lim, Yeji Lee, Jonghyun Kim, Jina Kim, Jeong Hwan Han, and Woongkyu Lee, "Growth of Rutile-TiO2 Thin Films on SnO2 layers as Gate Oxide in MOS Capacitors", KIEEME Annual Summer Conference 2021,  Gangwon-do, Korea,  June 30-July 2 (2021) - poster

3.   Jonghyun Kim, Daeun Lim, Yeji Lee, and Woongkyu Lee, "The Effect of Growth Temperature on Atomic Layer Deposition of Ti-doped ZnO Thin Films", KIEEME Annual Summer Conference 2021, Gangwon-do, Korea,  June 30-July 2 (2021) - poster

2.   Yeji Lee, Daeun Lim, Yujin Kim, Jonghyun Kim, Sungkyu Kim, and Woongkyu Lee, "Atomic Layer Deposition of Al2O3 Thin Films with Trimethylaluminum and Acetone on Si substrate", KIEEME Annual Summer Conference 2021,  Gangwon-do, Korea,  June 30-July 2 (2021) - oral

1.    Yeji Lee, Daeun Lim, Yujin Kim, and Woongkyu Lee, "Atomic Layer Deposition of Al2O3 Thin Films with Trimethylaluminum and Acetone", KCS 2021, Korea,  January 25-January29 (2021) - poster

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